Design and simulation of high-frequency (>100 MHz) ultrasonic phased array transducer

Author

Zhang, Jin-ying ; Xu, Wei-jiang ; Ji, Xin-ming ; Carlier, Julien ; Nongaillard, Bertrand ; Huang, Yi-ping

Author_Institution

Dept. d´´Opto-Acousto-Electron., Univ. de Valenciennes, Valenciennes, France

fYear

2010

Firstpage

1422

Lastpage

1424

Abstract

This paper presents a theoretical study on the possible realization of high frequency ultrasonic phased array transducer (f > 100 MHz) using MEMS technologies. A silicon based lithium niobate (LiNbO₃) single crystal linear array is considered. Finite element method is employed for the simulation optimization design of such device. Continuous wave beam steering, focusing under different array and matching conditions are simulated and the beam performance is analyzed. The inter-element cross-talking and the element electrical impedance are also calculated.

Keywords

beam steering; crosstalk; electric impedance; finite element analysis; lithium compounds; micromechanical devices; optimisation; silicon; ultrasonic transducer arrays; MEMS technology; continuous wave beam steering; element electrical impedance; finite element method; high-frequency ultrasonic phased array transducer; inter-element cross-talking; silicon based lithium niobate; simulation optimization design; single crystal linear array; Acoustics; Arrays; Finite element methods; Fluids; Focusing; Impedance; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-4244-5797-7

Type

conf

DOI

10.1109/ICSICT.2010.5667588

Filename

5667588