DocumentCode
1636964
Title
Bonding and gap states at GaAs- oxide interfaces
Author
Robertson, John
Author_Institution
Eng. Dept, Cambridge Univ., Cambridge, UK
fYear
2010
Firstpage
1311
Lastpage
1314
Abstract
The nature of bonding and possible causes of Fermi level pinning at high mobility, high K GaAs:HfO2 FET interfaces is described.
Keywords
Fermi level; III-V semiconductors; bonding processes; field effect transistors; gallium arsenide; hafnium compounds; Fermi level pinning; GaAs-HfO2; GaAs-oxide interface; HfO2 FET; bonding; gap state; high K GaAs; Atomic layer deposition; Gallium; Gallium arsenide; Logic gates; MOSFETs; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-5797-7
Type
conf
DOI
10.1109/ICSICT.2010.5667649
Filename
5667649
Link To Document