Two low reflectance of triple-layer broadband antireflection coating for silicon solar cells

Reflectance spectrum calculations for a MgF₂/diamond-like carbon(DLC)/DLC(or porous silicon (PS) ) silicon triple layer antireflection coating(ARCs) and the nanoporous silicon dioxide (NPSiO₂) / DLC/DLC(or PS) triple layer ARCs are performed using the matrix method. The results are compared with the corresponding spectrum of a silicon oxynitride (SiOxNy)/PS, DLC/PS double layer ARCs and some triple layer ARCs, such as MgF₂/Al₂O₃/ZnS triple layer ARCs. It is obtained that a lower reflectance in the very broad regions of the solar spectrum for the MgF₂/DLC/DLC (or PS) triple layer ARCs and NPSiO₂/DLC/DLC (or PS) three layer ARCs. The weighted reflectance R_w of those triple layer ARCs are 0.70% and 0.32%, respectively.