• DocumentCode
    1649214
  • Title

    From Micro to Nano: MEMS as an interface to the nano world

  • Author

    Boser, Bernhard E.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
  • fYear
    2006
  • Firstpage
    824
  • Lastpage
    825
  • Abstract
    Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and consumer applications, projection displays or inkjet print heads. In support of recent efforts to shrink dimensions to the nanoscale, MEMS has established itself as a perfect technology for interaction with the nanoworld. We will describe initial results using MEMS to manipulate single molecules for medical diagnostics. This technology has the potential to turn complex laboratory procedures into procedures that are as simple as taking the temperature
  • Keywords
    bioMEMS; biosensors; microsensors; nanobiotechnology; patient diagnosis; MEMS; medical diagnostics; microsystems technology; nanoscale systems; single molecule manipulation; Application software; Blood; Circuit testing; Electronic equipment testing; Immune system; Laboratories; Medical tests; Micromechanical devices; Performance evaluation; Protocols;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Computer-Aided Design, 2006. ICCAD '06. IEEE/ACM International Conference on
  • Conference_Location
    San Jose, CA
  • ISSN
    1092-3152
  • Print_ISBN
    1-59593-389-1
  • Electronic_ISBN
    1092-3152
  • Type

    conf

  • DOI
    10.1109/ICCAD.2006.320127
  • Filename
    4110129