Construction of an elementary education system on semiconductor processes for power devices using TCAD

To realize further high performance in semiconductor devices such as power devices in power electronics, the development of efficient processes and a reduction in the number of trial productions are indispensable. Therefore, the orientation of development plans and a reduction in trial production by using TCAD (Technology Computer Aided Design) are expected. Moreover, in relation to global environmental issues, the importance of energy technology is growing more and more, and expectation for power electronics is especially high. In power electronics, power devices play an important role. Thus research on power devices and education relevant to power devices are vital. However, detailed information of the processes, device structure, and circuits in general power devices are not publically disclosed. By using TCAD as a teaching tool in education for power electronics specializing in the semiconductor process of power devices, we can construct an education system that can solve these issues.