Radiofrequency helicon plasmas produced in Ar with concentrations of N/sub 2/ and O/sub 2/*

Summary form only given. We have designed and constructed a radiofrequency helicon plasma source to study Ar and Ar with a mixture of air constituents (N/sub 2/ and O/sub 2/). Experimental measurements of the radial and axial profiles of plasma density, electron temperature, lifetime and wave properties are presented employing Langmuir and B-dot probes. We investigate regimes from lower (1-20 mTorr) to higher gas pressures and the role of wave frequency (2-200 MHz) and magnetic field (200-1000 G) on the wave coupling and plasma profiles. The experimental results will be compared with ANTENA II and MAXEB simulation results which incorporate 1- and 2-D plasma density effects as well as the 2-D coupling antenna. The full electromagnetic and electrostatic character of the helicon wave will be examined. We discuss the dominant chemical and physical processes in air constituents (N/sub 2/, O/sub 2/ and N/sub 2//O/sub 2/) plasmas and examine means to efficiently detach electrons from negative ions and reduce the power budget.