Error analysis of connection frame deformation considering magnetic force and thermal-structural coupling effects

Connection frame has been a key module in a macro-micro platform. The error of connection frame deformation must be taken into account for nano-positioning motion in working process. While working, the nano-positioning motion is affected by the two major deformation error sources: magnetic force and thermal structural coupling effects. These error models were built by response surface method. Each experiment result can be obtained by calculation of finite element method. Their input variables of orthogonal experiment design were imported to the commercial software ANSYS to calculate and obtain output. The response surface model was built by the input and output data. Based on these models, change trends of deformation errors with design parameters can be revealed. And an optimal model of total deformations errors would be built. Finally, the minimum error of connection frame deformation considering magnetic force and thermal structural coupling effect was calculated by genetic algorithm. The optimal solutions were obtained when the total error iterate to 15 times as follows, D=32mm, L1=80mm, R=64mm. The improvement of deformation error considering magnetic force, thermal-structural coupling force and high acceleration is 86.48%, 0.26%, 26.85% These results can provide a more accurate prediction of error analysis in more widely used cases and also offer a theoretical support for improving nano-positioning accuracy of macro-micro platform.