Design and Simulation of an Integrated Metal Oxide Based Micro NO2 Gas Sensor

Author

Li, Ling-Han ; Dao, Dzung Viet ; Sugiyama, Susumu

Author_Institution

Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kusatsu

fYear

2006

Firstpage

1

Lastpage

5

Abstract

In this paper, a novel design of metal-oxide NO₂ gas sensor integrated with micro heaters is presented. This gas sensor is ultra small, with the size of 500mumtimes500mum. It has low power consumption less than 10 mW and high sensitivity up to 0.1ppm. The structure of gas sensor was designed, and computer-aided multi-physic simulations were carried out to analyze and optimize the performance of the gas sensor. Then the sensing circuit is designed and simulated. Finally, the fabrication process of the sensor is discussed

Keywords

circuit simulation; gas sensors; integrated circuit design; nitrogen compounds; 250000 micron; 500 micron; NO₂; computer-aided multiphysics simulation; fabrication process; integrated metal oxide; micro gas sensor; micro heaters; power consumption; sensing circuit design; Circuit simulation; Computational modeling; Computer simulation; Electrodes; Energy consumption; Gas detectors; Gas insulation; Substrates; Temperature sensors; Thermal sensors; Computer-aided simulation; NO2 sensor; metal oxide gas sensor; micro heater; thin film WO3;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro-NanoMechatronics and Human Science, 2006 International Symposium on

Conference_Location

Nagoya

Print_ISBN

1-4244-0717-6

Electronic_ISBN

1-4244-0718-1

Type

conf

DOI

10.1109/MHS.2006.320315

Filename

4110326