DocumentCode
1656244
Title
Tunneling acoustic microscopy
Author
Takata, Keiji
Author_Institution
Hitachi Ltd., Saitama, Japan
fYear
1992
Firstpage
723
Abstract
A new type of acoustic microscopy related to scanning tunneling microscopy (STM) is described, i.e., tunneling acoustic microscopy (TAM). TAM combines STM with an acoustic technique. The principle is to measure interactions capable of generating fine strains in the STM sample. This is achieved with detection of an acoustic wave induced by modulating the interaction. The features of the STM are enhanced with no reduction in its ability, and the device permits nonconducting materials to be imaged
Keywords
acoustic microscopy; atomic force microscopy; scanning tunnelling microscopy; atomic force detection; electrostatic force detection; fine strains; nonconducting materials; scanning tunneling microscopy; tunneling acoustic microscopy; Acoustic measurements; Acoustic signal detection; Acoustic waves; Capacitive sensors; Conducting materials; Electron microscopy; Electrostatics; Probes; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1992. Proceedings., IEEE 1992
Conference_Location
Tucson, AZ
Print_ISBN
0-7803-0562-0
Type
conf
DOI
10.1109/ULTSYM.1992.275906
Filename
275906
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