• DocumentCode
    1657027
  • Title

    New technology for old equipment [wet chemical process stations]

  • Author

    Vedaa, Norm ; Pakulski, Mark

  • Author_Institution
    Phoenix Process Autom., Corvallis, OR, USA
  • fYear
    1994
  • Firstpage
    220
  • Lastpage
    223
  • Abstract
    In September 1992, International Business Machines chose Phoenix Process Automation to upgrade six automated wet chemical process stations at IBM´s plant in Essex Junction, Vermont. After five to six years of operation, the stations had reached geriatric status, experiencing excessive downtime, frequent chemical spills, high scrap rates, and reduced throughput. IBM and Phoenix personnel worked closely to plan and implement a comprehensive upgrade program, which included major improvements to hardware and software controls. Today, the upgraded wet stations are delivering significantly improved throughput and yield, with dramatic reductions in equipment downtime, scrap, and chemical spills. The program´s success led to four additional upgrades and an ongoing collaboration between Phoenix and IBM to improve wet station reliability and productivity
  • Keywords
    integrated circuit manufacture; IBM fabrication plant; Phoenix Process Automation; automated wet chemical process stations; equipment downtime reduction; throughput improvement; upgrade program; yield improvement; Automatic control; Chemical processes; Hardware; Job shop scheduling; Personnel; Project management; Robot control; Robot kinematics; Robotics and automation; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
  • Conference_Location
    Cambridge, MA
  • Print_ISBN
    0-7803-2053-0
  • Type

    conf

  • DOI
    10.1109/ASMC.1994.588253
  • Filename
    588253