• DocumentCode
    1659174
  • Title

    Suppression of Er optical de-activation using silicon-rich silicon nitride

  • Author

    Yang, Moon-Seung ; Kim, Kyung Joong ; Shin, Jung H.

  • Author_Institution
    Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon
  • fYear
    2007
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    The effect of nitride passivation on the Si nanocluster -Er coupling and Er optical activity is investigated. Based on a comparison with Er doped Si-rich Si oxide (SRSO), breaking of nc-Si/Er coupling and Er de-activation in Si-rich Si nitride (SRSN) are strongly reduced.
  • Keywords
    elemental semiconductors; erbium; nanostructured materials; nitridation; optical rotation; passivation; silicon; silicon compounds; Si; SiN:Er; nanocluster; nitride passivation effect; optical de-activation; silicon-rich silicon nitride; Annealing; Erbium; Luminescence; Optical films; Optical sensors; Particle beam optics; Semiconductor films; Silicon; Stimulated emission; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2007 4th IEEE International Conference on
  • Conference_Location
    Tokyo
  • Print_ISBN
    978-1-4244-0934-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2007.4347674
  • Filename
    4347674
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1659174