Patterned Co/Pd multilayer structure for high-density magnetic recording media

For development of high-density magnetic recording media, superparamagnetism due to thermal instability has been a main problem in make the density limitations. One of the most promising methods to overcome superparamagnetism is the use of patterned media. Particularly, Co/Pd multi-layer has been one of the significant materials for high-density magnetic recording media. In this study, we fabricated the patterned Co/Pd multilayer structures using electron-beam lithography and a dry etching technique and investigated the magnetic properties of the patterned structures.