Polymer-assisted deposition of Co-doped zinc oxide thin film for the detection of aromatic organic compounds

Cobalt-doped Zinc oxide thin film was deposited onto SiO₂/Si substrate using polymer-assisted deposition method. The surface morphology, phase structure and chemical state of the thin film were characterized by SEM, XRD, and XPS. The gas-sensing characteristics of the thin film upon exposure to aromatic organic compound vapors were investigated with a home-made sensor measurement system. The current results show that the film morphology is influenced by the doping of Co, and the sensor behavior was quite different between undoped and Co-doped ZnO thin films.