Electron drift velocity determination in hydrogen

Summary form only given. This paper reports the results of calculating the electron drift velocity V/sub dr/ of measured data on RF discharge breakdown in hydrogen. We have determined this from the location of the turning point of the diffusion-drift branch of RF breakdown curves. As is known at this point the electron displacement amplitude in the RF field A=eE/(m v/sub em//spl omega/) (v/sub en/ is the effective electron-neutral collision frequency, /spl omega/=2 /spl pi/f) is equal to one half of the electrode spacing L. At the same time A=V/sub dr///spl omega/. Thus we have for the electron drift velocity V/sub dr/=L /spl pi/f. The coordinates of the turning point (pressure p and RF voltage U) permit calculation of the ratio E/p corresponding to the electron drift velocity value obtained. The measurements have been performed at the RF frequency f=13.56 L=6-70 mm, p=10/sup -3/-20 Torr.