DocumentCode
1684782
Title
Spatial Profiles Of Plasma Properties In Planar Rf Inductive Discharges - 1) Role Of Chamber Length And 2) Anisotropy Of Electron Velocity Distributions
Author
Mahoney, L.J. ; Wendt, A.E. ; Shohet, J.I.
Author_Institution
University of Wisconsin
fYear
1994
Firstpage
107
Lastpage
107
Keywords
Electrons; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Plasma properties; Plasma temperature; Plasma transport processes; Probes; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588784
Filename
588784
Link To Document