• DocumentCode
    1684881
  • Title

    Effects Of EM Modes To 2D Landau Damping In Inductively Coupled Plasma Sources And Optimal Geometry Design Of Reactors For Exciting Appropriate Modes

  • Author

    Chwan-Hwa Wu ; Fa Dai

  • Author_Institution
    Auburn University,
  • fYear
    1994
  • Firstpage
    108
  • Lastpage
    109
  • Keywords
    Damping; Etching; Geometry; Inductors; Nuclear and plasma sciences; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588788
  • Filename
    588788
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1684881