• DocumentCode
    1685005
  • Title

    Diagnostic Characterization And Theoretical Modeling Of Ecr Plasmas

  • Author

    Douglass, S.R. ; Weber, B.V. ; Eddy, C.R. ; Lampe, M. ; Joyce, G. ; Manheimer, W.

  • Author_Institution
    Naval Research Laboratory
  • fYear
    1994
  • Firstpage
    110
  • Lastpage
    110
  • Keywords
    Coils; Inductors; Magnetic field measurement; Microwave measurements; Plasma chemistry; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma properties; Probes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588794
  • Filename
    588794
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1685005