• DocumentCode
    1685862
  • Title

    Pressure Dependence Of He rf Discharges

  • Author

    Kimura, T. ; Ohe, K.

  • Author_Institution
    Nagoya Institute of Technology,
  • fYear
    1994
  • Firstpage
    123
  • Lastpage
    123
  • Keywords
    Electric variables measurement; Electrons; Heating; Helium; Plasma measurements; Power dissipation; Power engineering and energy; Pressure measurement; Radio frequency; Systems engineering and theory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588839
  • Filename
    588839
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1685862