• DocumentCode
    1686800
  • Title

    Measurement Of Two Dimensional Velocity Distributions Of Ions In A Plasma Chamber

  • Author

    Hancock, G. ; Lanyi, L. ; Woodcock, B.K.

  • Author_Institution
    University of Oxford,
  • fYear
    1994
  • Firstpage
    135
  • Lastpage
    135
  • Keywords
    Etching; Inductors; Laser transitions; Plasma applications; Plasma chemistry; Plasma measurements; Plasma temperature; Pump lasers; Stimulated emission; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588877
  • Filename
    588877
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1686800