DocumentCode
1686941
Title
Energy Distributions Of Positive Ions At The Grounded Elect Rode Of A Radio-frequent Y Glow Discharge In Hydrogen
Author
Radovanov, S.B. ; Olthoff, J.K. ; Van Brunt, R.J. ; Sobolewskl, M.A.
Author_Institution
National Institute of Standards and Technology,
fYear
1994
Firstpage
137
Lastpage
137
Keywords
Current measurement; Electrodes; Electrostatic measurements; Energy measurement; Hydrogen; Plasma chemistry; Plasma density; Plasma measurements; Plasma waves; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588882
Filename
588882
Link To Document