DocumentCode
1688778
Title
Microwave Plasma Considerations Fur Cvd Of Diamond Films At Low Substrate Temperatures
Author
Ulczynski, M. ; Reinhard, D.K. ; Prystajko, M. ; Asmussen, J.
Author_Institution
Michigan State University
fYear
1994
Firstpage
164
Lastpage
164
Keywords
Atmospheric modeling; Atomic layer deposition; Atomic measurements; Diamond-like carbon; Inductors; Plasma chemistry; Plasma density; Plasma temperature; Plasma transport processes; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588979
Filename
588979
Link To Document