PZT Films on Wafers and Fibers for MEMS Application

A single PZT metallic target has been utilized to deposit lead zirconate titanate (PZT) films by DC pulsed magnetron sputtering on Ti/Pt(111)/Ti coated Si wafer and on Au coated glass fibers. Multicrystalline PZT films were obtained after post treatment by conventional (CA) and rapid thermal annealing (RTA) at 650°C in air and vacuum. The influences of both post-annealing treatments on the film properties were evaluated. Conventional annealed films showed a different texture orientation than RTA annealed films. It has been observed that conventional annealed films show higher remanent polarization and lesser coercive field than RTA annealed films. PZT films were also successfully deposited on Au coated glass fibers. Coated fibers were post annealed by RTA@600°C to obtain a PZT structure. Surface morphology of the films showed that the CA annealed films have denser grains and less crack formations than RTA annealed films. Coated fibers show a dense and crack free structure.