300mm+ factory layout design and innovations for advanced semiconductor manufacturing

Author

Yih-Jan Huang ; Chia-Yin Kuo ; Ming-Te Kao ; Huang, R. ; Lee, Fred

Author_Institution

Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan

fYear

2014

fDate

19-21 May 2014

Firstpage

98

Lastpage

102

Abstract

In conclusion, the study has applied AHP method to compare and to define the weighting of factors in a factory macro layout design. The results pointed out process flow, process time, contamination control rule and safety rule are the critical factors. Thus, from macro layout design stage, layout design team needs to consider process flow and process time by different technology nodes because those have great impact on manufacturing performance [3]. In addition to operation related issue, factory layout design also needs to focus on safety & risk related issue such as defining escape path, tool move-in path or other ergonomics issues.

Keywords

analytic hierarchy process; ergonomics; integrated circuit layout; semiconductor device manufacture; AHP method; advanced semiconductor manufacturing; contamination control rule; ergonomics; escape path; factory layout design; factory layout innovations; factory macro layout design; process flow; process time; safety rule; tool move-in path; Analytic hierarchy process; Contamination; Layout; Manufacturing; Planning; Production facilities; Safety;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI

Conference_Location

Saratoga Springs, NY

Type

conf

DOI

10.1109/ASMC.2014.6846985

Filename

6846985