DocumentCode
169412
Title
Hidden equipment productivity opportunities
Author
Kinauer, Jochen ; Muller, Benjamin
Author_Institution
AIS Autom. Dresden GmbH, Dresden, Germany
fYear
2014
fDate
19-21 May 2014
Firstpage
165
Lastpage
168
Abstract
With this paper we will explain opportunities to increase equipment efficiency based on results of a pilot installation to track wafer-to-wafer OEE (Overall Equipment Efficiency) at a 300mm manufacturing site and examples how predictive maintenance procedures can be coordinated with the usage of mobile devices for process & equipment data analysis and as mobile maintenance logbooks.
Keywords
data analysis; maintenance engineering; manufacturing data processing; mobile handsets; production engineering computing; productivity; semiconductor device manufacture; semiconductor industry; semiconductor technology; equipment data analysis; hidden equipment productivity opportunities; maintenance procedures; manufacturing site; mobile devices; mobile maintenance logbooks; overall equipment efficiency; process data analysis; wafer-to-wafer OEE; Maintenance engineering; Manufacturing; Mobile communication; Mobile handsets; Monitoring; Performance evaluation; Real-time systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
Conference_Location
Saratoga Springs, NY
Type
conf
DOI
10.1109/ASMC.2014.6846990
Filename
6846990
Link To Document