DocumentCode

1695711

Title

Electron Collision Data For BCl/sub 3/ Plasmas

Author

Winstead, Chris ; Pritchard, H.P. ; McKo, V.

Author_Institution

A. A. Noyes Laboratory of Chemical Physics

fYear

1994

Firstpage

215

Lastpage

215

Keywords

Argon; Electrodes; Electrons; Etching; Inductors; Optical imaging; Optical recording; Plasma applications; Plasma materials processing; Plasma properties;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

conf

DOI

10.1109/PLASMA.1994.589122

Filename

589122