Realization of a new sensor concept: improved CCFET and SGFET type gas sensors in Hybrid Flip-Chip technology

A wide range of emerging applications in the consumer sector is envisioned for low-cost gas sensors with a high degree of adaptability to special measuring applications. The readout of gas induced work function changes via hybrid suspended gate field effect devices is already accepted as a promising technique for the realisation of a versatile, low-cost sensor platform. However, the industrialisation is still in the beginning. We report the realisation of the innovative, cheaply manufacturable Hybrid Flip-Chip (HFCFET) setup which was introduced. Using different modifications of improved ISFET and CCFET type transducers we compare the performance of these readout devices. Additionally, the design of the readout structures was improved compared to other reported devices. Profiting from the use of a standard CMOS process an analogue readout circuit was integrated in a CCFET type transducer enabling an on-chip reference and compensation of signal drifts.