Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection

Author

Anagnostopoulos, C.N. ; Chwalek, J.M. ; Delametter, C.N. ; Hawkins, G.A. ; Jeanmaire, D.L. ; Lebens, J.A. ; Lopez, A. ; Trauernicht, D.P.

Author_Institution

Res. & Dev. Labs., Eastman Kodak Co., Rochester, NY, USA

Volume

1

fYear

2003

Firstpage

368

Abstract

We present the architecture and fabrication method of a fluidic device with increased droplet deflection. The device is capable of producing picoliter size droplets precisely and steering them. The precision is a consequence of the reproducibility of the nozzles that are made using VLSI technology and tools. In addition, the droplet size is determined by the precise timing of applied heat pulses. We present both experimental and modeling results.

Keywords

CMOS integrated circuits; VLSI; drops; elemental semiconductors; jets; metering; microfluidics; nozzles; silicon; Si; VLSI; droplet deflection; droplet metering; droplet size; fluidic device fabrication; heat pulses; microjet nozzle array; nozzles; picoliter size droplets; reproducibility; steering; CMOS process; CMOS technology; Fabrication; Fluid flow; Geometry; Laboratories; Reproducibility of results; Reservoirs; Temperature; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1215330

Filename

1215330