Piezolectric 2D micro scanner for minimally invasive therapy fabricated using femtosecond laser ablation

Piezoelectric two dimensional (2D) micro scanner was developed for medical laser scanning micro tool that is inserted in the human body and observes tissue microstructures optically and scans laser for treatment. The structure of developed micro scanner consists of three piezoelectric unimorph cantilevers, a mirror, three flexible joints and a pivot. The joints link the end of the unimorph cantilevers with the mirror. The size of the micro scanner part is 1.6 mm/spl times/5.0 mm, and the thickness is 100 /spl mu/m. The mirror tilted in two dimensions and maximum tilting angle was 2.23 degree when 60 V was applied. The 2D scanner and optical system will be packaged in a tube of 2 mm diameter which can be inserted in a working channel of a conventional endscope.