Coupled field analysis of electrostatic Comb-Drive actuator using reduced order modeling principles

This paper presents a modeling of lateral electrostatic comb drive actuator and develops a 2D finite element model using reduced order modeling (ROM) principles to analyze the coupled field. This technique reduces the comb drive to a group of equivalent lumped parameters finite elements which capture the device behavior. Finally, Simulation results are validated using an analytical approach, both methods give very similar results. The strongly coupled field problem is effectively solved by reduced order modeling (ROM) and the relation between structure parameters and the electrostatic force and the displacement is discussed.