• DocumentCode
    1707343
  • Title

    Contactless characterization of MEMS devices using optical microscopy

  • Author

    Timár, András ; Bognar, Gabor

  • Author_Institution
    Dept. of Electron Devices, Tech. Univ. of Budapest, Budapest
  • fYear
    2009
  • Firstpage
    210
  • Lastpage
    213
  • Abstract
    In this paper a new approach for measuring depth values of cavities of micro-electro mechanical system (MEMS) is presented. This measurement was done by using a simple optical microscope and image processing techniques. The sample need not to be treated with any foreign material such as reflective or conductive coating.
  • Keywords
    image processing; micromechanical devices; optical images; optical microscopy; spatial variables measurement; MEMS device; depth measurement; image processing technique; microelectro mechanical system; optical microscope; Coatings; Conducting materials; Image processing; Mechanical systems; Mechanical variables measurement; Microelectromechanical devices; Micromechanical devices; Optical devices; Optical materials; Optical microscopy; 2-D DFT; FFT; MEMS characterization; depth measurement; edge detection; height map; image processing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design and Diagnostics of Electronic Circuits & Systems, 2009. DDECS '09. 12th International Symposium on
  • Conference_Location
    Liberec
  • Print_ISBN
    978-1-4244-3341-4
  • Electronic_ISBN
    978-1-4244-3340-7
  • Type

    conf

  • DOI
    10.1109/DDECS.2009.5012130
  • Filename
    5012130
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1707343