DocumentCode
171604
Title
A 1.1 THz micromachined on-wafer probe
Author
Bauwens, Matthew F. ; Alijabbari, Naser ; Lichtenberger, Arthur W. ; Barker, N.S. ; Weikle, Robert M.
Author_Institution
Dominion MicroProbes, Inc., Charlottesville, VA, USA
fYear
2014
fDate
1-6 June 2014
Firstpage
1
Lastpage
4
Abstract
This paper presents a micromachined probe for on-wafer measurements of circuits in the WR-1.0 waveguide band (0.75 - 1.1 THz). The probe shows a measured insertion loss of less than 7 dB and return loss of greater than 15 dB over most of the band. These are the first reported on-wafer measurements above 1 THz.
Keywords
millimetre wave integrated circuits; millimetre wave measurement; submillimetre wave integrated circuits; submillimetre wave measurement; circuit measurement; frequency 0.75 THz to 1.1 THz; insertion loss measurement; micromachined on wafer probe; return loss measurement; Coplanar waveguides; Data communication; Delays; Digital multimedia broadcasting; Indium phosphide; Loss measurement; Micromachining; probes; submillimeter wave integrated circuits; submillimeter wave measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium (IMS), 2014 IEEE MTT-S International
Conference_Location
Tampa, FL
Type
conf
DOI
10.1109/MWSYM.2014.6848607
Filename
6848607
Link To Document