DocumentCode
1717360
Title
Using EWOD (electrowetting-on-dielectric) actuation in a micro conveyor system
Author
Moon, Ilju ; Kim, Joonwon
Author_Institution
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
Volume
1
fYear
2005
Firstpage
139
Abstract
The paper reports the development of a novel application of EWOD (electrowetting-on-dielectric) actuation in a micro conveyor system. Using the movement of liquid droplets by EWOD actuation as a part of active mechanical component moving, a simple and effective mechanism for the micro conveyor system can be realized for the first time. The concept, fabrication and test of the initial devices are reported and various possible applications are discussed.
Keywords
drops; microactuators; micromachining; active mechanical component moving; electrowetting-on-dielectric actuation; micro conveyor system; micro transportation systems; Contacts; Control systems; Dielectric substrates; Electrodes; Fabrication; Glass; Silicon; Testing; Transportation; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1496378
Filename
1496378
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