New surface morphology for low stress thin-film-coated thermal neutron detectors

Author

McGregor, Douglas S. ; Klann, Raymond T. ; Gersch, Holly K. ; Ariesanti, ElsaElsa ; Sanders, Jeffrey D. ; VanDerElzen, Brian

Author_Institution

SMART Lab., Michigan Univ., Ann Arbor, MI, USA

Volume

4

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

2401

Lastpage

2405

Abstract

Experimental devices using patterns of holes etched into semiconductor surfaces are under evaluation for use as neutron detectors. The devices have miniature holes equidistantly spaced so as to completely cover the front surface of a planar semiconductor device. The devices have both electrical contacts and neutron reactive coatings applied over the surface and within the holes. The tiny via holes assist in thin-film adhesion while offering a method to increase the thermal-neutron detection efficiency

Keywords

gallium arsenide; neutron detection; semiconductor counters; surface topography; GaAs-B; electrical contacts; miniature holes; neutron detectors; neutron reactive coatings; planar semiconductor device; semiconductor surfaces; surface morphology; thermal-neutron detection efficiency; thin-film adhesion; Adhesives; Coatings; Contacts; Detectors; Etching; Neutrons; Semiconductor devices; Semiconductor thin films; Surface morphology; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Nuclear Science Symposium Conference Record, 2001 IEEE

Conference_Location

San Diego, CA

ISSN

1082-3654

Print_ISBN

0-7803-7324-3

Type

conf

DOI

10.1109/NSSMIC.2001.1009304

Filename

1009304