Enhanced functionality of cantilever based mass sensors using higher modes and functionalized particles

Author

Dohn, Soren ; Sandberg, Rasmus ; Svendsen, Winnie ; Boisen, Anja

Author_Institution

Dept. of Micro & Nanotechnology, Tech. Univ. Denmark, Lyngby, Denmark

Volume

1

fYear

2005

Firstpage

636

Abstract

By positioning a single gold-particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the 4^th bending mode, thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.

Keywords

Q-factor; mass measurement; microsensors; sensitivity; cantilever based mass sensors; fourth bending mode; gold-particle; intrinsic sensitivity; mass position; mass responsivity; quality factor; spatial resolution; Actuators; Effective mass; Nanoscale devices; Nanotechnology; Q factor; Resonance; Resonant frequency; Sensor systems and applications; Spatial resolution; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496497

Filename

1496497