Thermopneumatic-actuated PDMS microvalve and micropump integrated with the same fabrication process

We proposed a new PDMS microfluidic system including microvalves and micropump that are easily integrated on the same substrate with the same process steps. The pumping rate of a fabricated microfluidic system was measured under various frequencies and duty ratios of applied power. The maximum pumping rate of about 26 nl/min is measured under the duty ratio of 1 % at 2 Hz of the applied pulse voltage. The dynamic response of the microvalve in the microfluidic system is measured under the on/off alternation with the applied power of 100 mW.