MOEMS focusing device with ideal parabolic deflection shape

A new concept of a MOEMS based focusing device has been developed which can be used as element in a wide range of optical applications. The device consists of an electrostatically driven membrane-mirror with almost perfect parabolic shape over a very large area and a ring shaped counter electrode which is part of the chip package. The device has been optimized for a parabolic deflection shape over a large surface area by coupled field FEM simulation. Using SOI-technology, the realization of stress free membranes with a diameter up to several 10 mm is possible. The device can be used in active optical applications where large numerical aperture are essential. Potential applications are e.g. confocal microscopy or scanning applications for focus control.