Integration of MEMS with a SoC in a microrobot

This article presents an integration technique for electrostatic motors with a SoC-type microelectronic circuit for design of a miniature robot of size 3 mm × 3 mm × 3 mm. More precisely, a technique of assembling the parts of a microrobot with the aid of a mould and a compact interconnection technique integrable on a three dimensional structure with the aid of microfabrication techniques.