DocumentCode
1724758
Title
Full automatic on the fly optical macro wafer edge inspection system
Author
Kirmizigül, Denis ; Fröhlich, Heiko
Author_Institution
Inst. of Artificial Intell., Dresden Univ. of Technol., Dresden, Germany
fYear
2011
Firstpage
1
Lastpage
3
Abstract
We present a low cost optical macro inspection system for the wafer edge. The system is able to inspect the full wafer edge (front-, backside and apex) and provides a short feedback loop to the unit processes. Furthermore the use of image processing methods enables inspection without additional time loss. This inspection system can be installed on all wafer rotating tools with free space for hardware installation.
Keywords
automatic optical inspection; edge detection; feedback; industrial robots; materials handling; feedback loop; image processing method; low cost optical macro wafer edge inspection system; wafer rotating tool; Cameras; Copper; Image color analysis; Image edge detection; Inspection; Probability distribution; Robot vision systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Conference_Location
Saratoga Springs, NY
ISSN
1078-8743
Print_ISBN
978-1-61284-408-4
Electronic_ISBN
1078-8743
Type
conf
DOI
10.1109/ASMC.2011.5898170
Filename
5898170
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