DocumentCode
1726321
Title
Development of polymer-based artificial haircell using surface micromachining and 3D assembly
Author
Chen, J. ; Engel, J. ; Chang Liu
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Volume
2
fYear
2003
Firstpage
1035
Abstract
We report the development of an artificial haircell (AHC) fabricated using polymer surface micromachining and efficient 3D assembly. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design and fabrication process are discussed in the paper. Response to static deflection and airflow is also discussed.
Keywords
Permalloy; aluminium; chromium alloys; gold; mechanoception; micromachining; nickel alloys; polymers; strain gauges; 3D assembly; AlNiCrCrAuFeNi; airflow; biological hair cells; polymer surface micromachining; polymer-based artificial haircell; static deflection; versatile mechanoreceptor; Assembly; Capacitive sensors; Fluid flow measurement; Hair; Micromachining; Polymer films; Robustness; Silicon; Substrates; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7731-1
Type
conf
DOI
10.1109/SENSOR.2003.1216945
Filename
1216945
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