DocumentCode
1727226
Title
New performance bounds for semiconductor manufacturing plants: batch tools and setups
Author
Morrison, James R. ; Kumar, P.R.
Author_Institution
Illinois Univ., Champaign, IL, USA
Volume
2
fYear
1999
fDate
6/21/1905 12:00:00 AM
Firstpage
1363
Abstract
The state space approach to obtaining performance bounds via the average cost inequality allows for the incorporation of model elements such as batch tools and setup modes. We demonstrate with an example how one may construct linear programs to obtain performance bounds for queueing network models of semiconductor manufacturing plants
Keywords
Markov processes; batch processing (industrial); integrated circuit manufacture; linear programming; matrix algebra; probability; queueing theory; average cost inequality; batch tools; performance bounds; queueing network models; semiconductor manufacturing plants; setup modes; Conductors; Contracts; Cost function; Job shop scheduling; Linear programming; Probability distribution; Semiconductor device manufacture; Semiconductor device modeling; State-space methods; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 1999. Proceedings of the 38th IEEE Conference on
Conference_Location
Phoenix, AZ
ISSN
0191-2216
Print_ISBN
0-7803-5250-5
Type
conf
DOI
10.1109/CDC.1999.830140
Filename
830140
Link To Document