Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Author

Beomjoon Kim ; Collard, D. ; Lagouge, M. ; Conseil, F. ; Legrand, B. ; Buchaillot, L.

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

Volume

2

fYear

2003

Firstpage

1255

Abstract

We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of the thermal expansion coefficients between poly-Si and transparent thick polymer (SU-8), are built from a flow channel on the substrate. This paper deals with the detail fabrication, actuation of device and the simulation results for our bimorph probe arrays. The motion of the actuated device is well coincident with the calculated value.

Keywords

biosensors; electric sensing devices; elemental semiconductors; microactuators; polymers; silicon; thermal expansion; SU-8; Si; bimorph probe arrays; biocell; cantilevers; channel flow; electrical sensor device; microfabricated device; surface micromachined polysilicon; thermal expansion; thermal microactuators; thermally actuated probe arrays; transparent thick polymer; Actuators; Biosensors; Electric variables measurement; Etching; Fabrication; Fluidics; Force measurement; Optical sensors; Probes; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217000

Filename

1217000