Preparation of anodic aluminum oxide nano-template using Al/Si substrate for large area LED applications

Author

Shen, Lan ; Kim, Doogwook ; Min, Bonggi ; Gu, Zhengbin ; Park, Chinho

Author_Institution

Yeungnam Univ., Gyeongsan, South Korea

fYear

2010

Firstpage

165

Lastpage

166

Abstract

Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.

Keywords

aluminium compounds; anodisation; electrochemistry; nanofabrication; nanoporous materials; Al-Si; Al₂O₃; anodic oxidation; hexagonal-close-packed nanopore arrays; morphological structure; nanotemplates; scanning electron microscopy; thin films; Aluminum oxide; Films; Light emitting diodes; Nanostructures; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672133

Filename

5672133