• DocumentCode
    1729079
  • Title

    Investigation of lateral-field-excitation on LiTaO3 single crystal

  • Author

    Ma, Tingfeng ; Zhang, Zhitian ; Wang, Wenyan ; Zhang, Chao ; Feng, Guanping

  • Author_Institution
    Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
  • fYear
    2010
  • Firstpage
    489
  • Lastpage
    492
  • Abstract
    Lateral field excitation (LFE) acoustic wave devices, which employ two electrodes on the same surface of a piezoelectric substrate, have been found attractive in sensing applications. However, up to now, the cut for the pure-LFE mode of LiTaO3 is still unknown, which has hindered the application of LiTaO3 pure-LFE mode device in liquid phase sensing. In this work, pure-LFE on LiTaO3 was investigated both theoretically and experimentally. The calculated results showed that when the driving electric field direction is parallel to the crystallographic X-axis of the piezoelectric substrate, (yxl)90° LiTaO3 LFE device works on pure-LFE mode with a piezoelectric coupling factor of 44.52% for slow shear c mode of LFE. The devices´ impedance curves were measured. The experimental results agreed with the theoretical prediction well.
  • Keywords
    electrodes; liquid crystals; lithium compounds; piezoelectric devices; surface acoustic wave devices; tantalum compounds; LFE mode device; LiTaO3; LiTaO3 single crystal; crystallographic X-axis; device´ impedance curve; electric field direction; electrodes; lateral field excitation acoustic wave devices; liquid phase sensing; piezoelectric coupling factor; piezoelectric substrate; Acoustic waves; Couplings; Electric fields; Electrodes; Impedance; Resonant frequency; Sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium (FCS), 2010 IEEE International
  • Conference_Location
    Newport Beach, CA
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-6399-2
  • Type

    conf

  • DOI
    10.1109/FREQ.2010.5556282
  • Filename
    5556282