Micro-machined tunable optical filters with optimized band-pass spectrum

Author

Hohlfeld, D. ; Zappe, H.

Author_Institution

Inst. for Microsyst. Technol., Freiburg Univ., Germany

Volume

2

fYear

2003

Firstpage

1494

Abstract

A novel MEMS-based tunable optical filter structure is presented which for the first time combines the advantages of an optimized filter shape function with tunability. Such a filter is essential for monitoring and reconfiguration of optical communication networks. The device is based on a Fabry-Perot interferometer employing multiple solid-state silicon cavities and dielectric Bragg mirrors. It is fabricated as a self-supporting membrane with thin film metal resistors using silicon MEMS technology.

Keywords

elemental semiconductors; micro-optics; micromechanical devices; optical filters; semiconductor device models; silicon; Fabry-Perot interferometer; MEMS-based tunable optical filter structure; band-pass spectra; dielectric Bragg mirrors; film metal resistors; micromachined tunable optical filters; optical communication networks; self-supporting membrane; silicon MEMS technology; solid-state silicon cavities; Band pass filters; Dielectric devices; Dielectric thin films; Fabry-Perot interferometers; Monitoring; Optical fiber communication; Optical filters; Shape; Silicon; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217060

Filename

1217060