DocumentCode
1729258
Title
Electro-statically actuated light emitting device using OLED
Author
Motoyama, M. ; Hoshino, K. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution
Tokyo Univ., Japan
Volume
2
fYear
2003
Firstpage
1506
Abstract
We propose a process of a light emitting device fabricated on the top surface of a micro structure. The proposed process has made it possible to fabricate light sources on silicon micro actuators released partly from the wafer. A light source is an Organic Light Emitting Diode (OLED) composed of electrodes and an organic layer evaporated on the top surface of a micro structure.
Keywords
electrostatic actuators; elemental semiconductors; light sources; organic light emitting diodes; silicon; OLED top surface; Si; device microstructure; electrodes; electrostatically actuated light emitting device; light sources; organic layer evaporation; organic light emitting diode; silicon micro actuators; Aluminum; Anodes; Cathodes; Electrodes; Fabrication; Insulation; Light sources; Organic light emitting diodes; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7731-1
Type
conf
DOI
10.1109/SENSOR.2003.1217063
Filename
1217063
Link To Document