Design, fabrication, and package of MEMS-based image stabilizer for photographic cell phone applications

This work presents a MEMS-based image stabilizer applied for anti-shaking function in photographic cell phones. The proposed stabilizer is designed as a two axis decoupling XY stage and strong to suspend an image sensor. Based on the special designs of a hollow handle layer and a corresponding wire bonding assisted holder, electrical signals of the suspended image sensor can be sent out with signal springs. The longest traveling distance of the stabilizer is 25 μm with 51 V applied voltage and sufficient to resolve the anti-shaking problem in a three megapixel image sensor and with excellent decoupling capability.