• DocumentCode
    1731297
  • Title

    Physical and electrical characterization of Germanium or Tellurium rich GexTe1−x for phase change memories

  • Author

    Pashkov, N. ; Navarro, G. ; Bastien, J.-C. ; Suri, M. ; Perniola, L. ; Sousa, V. ; Maitrejean, S. ; Persico, A. ; Roule, A. ; Toffoli, A. ; Reimbold, G. ; De Salvo, B. ; Faynot, O. ; Zuliani, P. ; Annunziata, R.

  • Author_Institution
    Leti, CEA, Grenoble, France
  • fYear
    2011
  • Firstpage
    91
  • Lastpage
    94
  • Abstract
    This paper intends to provide an overview of electrical performances of GexTe1-x with different proportions of Germanium or Tellurium for phase-change memories. Germanium-rich as well as Tellurium-rich phase-change materials have been integrated in simple test devices and programming characteristics, data retention and endurance performances are thoroughly analyzed. Tellurium-rich GeTe alloys exhibit stable programming characteristics that can sustain endurance test up to 1e7 cycles, while Germanium-rich GeTe, probably triggered by Ge segregation, shows an unstable RESET state during repeated write/erase cycles. Data retention on fresh devices is best for out-of-stoichiometry GeTe.
  • Keywords
    germanium compounds; phase change materials; phase change memories; GexTe1-x; RESET state; data retention; electrical characterization; electrical performances; out-of-stoichiometry; phase change materials; phase change memories; programming characteristics; test devices; write-erase cycle; Crystallization; Metals; Performance evaluation; Phase change memory; Programming; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European
  • Conference_Location
    Helsinki
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4577-0707-0
  • Electronic_ISBN
    1930-8876
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2011.6044227
  • Filename
    6044227