Embedded 3D BioMEMS for multiplexed label free detection

This paper presents an approach for rapid, label-free, multiplexed detection of biomarkers using an array of RF MEMS shunt capacitors. We have demonstrated two parallel modes of sensing using a single RF MEMS shunt capacitor. Surface stress change and RF signal losses, due to specific biomolecular binding, are the two parallel sensing modes realized. The design and fabrication of RF MEMS shunt capacitor, and the associated signal readout are discussed. Bio-detection ability of an RF MEMS shunt capacitor is validated by detecting Staphylococcus Aureus using mouse monoclonal IgG₃ proteins. The data indicated 50% change in the signal readout due to membrane deflection for 160μg/mL of S. aureus. We also propose a barcode approach for multiplexed detection of biomarkers using a distributed microfluidic embedded RF MEMS system is proposed.