DocumentCode

1732023

Title

On The Electromechanical Behaviour Of Thin Perforated Backplates In Silicon Condenser Microphones

Author

Pedersen, M. ; Olthuis, W. ; Bergveld, P.

Author_Institution

MESA Research Institute, University of Twente

Volume

2

fYear

1995

Firstpage

13

Lastpage

16

Keywords

Biomembranes; Electrets; Mechanical sensors; Micromachining; Microphones; Numerical simulation; Silicon; Solids; Stress; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721732

Filename

721732