• DocumentCode
    1732340
  • Title

    Measurement Of Piezoelectricity Of Thin Film By Using Laser Interferometry And Davies´ Bar

  • Author

    Umeda, Akira ; Ueda, Kazunaga ; Usuda, Takashi ; Tanaka, Katsuhiko ; Toyama, Motoo ; Kubo, Ryuichi

  • Author_Institution
    National Research Laboratory of Metrology
  • Volume
    2
  • fYear
    1995
  • Firstpage
    64
  • Lastpage
    67
  • Keywords
    Acceleration; Bandwidth; Frequency; Interferometry; Optical reflection; Piezoelectric films; Piezoelectricity; Pulse generation; Silicon; Vibration measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721745
  • Filename
    721745
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1732340